An Investigation into the Physics of Blowing Polysilicon Fuses

Abstract

The semi-conductor fuses in this research are fabricated on a submicron process. A voltage potential is applied across the fuse, in order to achieve a blow. This current peaks with a short pulse in the order of tens of milliamps which has a long decrease to zero current flow, resulting in a blown fuse. A fuse blows due to the pinching together of electrically insulating material which initially surrounds the conducting pathway. The pinch cuts across the conductor, and so halts the current flow. In small-geometry fuses a cavity also forms during the blowing process.

The company wishes to understand the fuse blow process mathematically in order to develop a model that can accurately simulate the blowing of the fuses. This report records the thermal, electrical, solid and fluid mechanics of the blowing process that was discussed at the Study Group, with remarks on possible future research for modelling the process.