Bhattacharya, A. and Breward, C.J.W. and Gratton, M. and Evans, J. and Nicholas, M. and Please, C. and Schwendeman, D. and Surles, M. and Witelski, T. (2005) Lubrication Layer Perturbations in Chemical-Mechanical Polishing. [Study Group Report]
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| Item Type: | Study Group Report |
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| Problem Sectors: | Energy and utilities Materials Information and communication technology |
| Study Groups: | US Workshop on Mathematical Problems in Industry > 21st MPI [Worcester 13/6/2005 - 17/6/2005] |
| Company Name: | Araca Incorporated/Intelligent Planar (Tucson Arizona 85750) |
| ID Code: | 73 |
| Deposited By: | Gordon White |
| Deposited On: | 06 Jul 2006 |
| Last Modified: | 29 May 2015 19:46 |
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