?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Adc&rft.relation=http%3A%2F%2Fmiis.maths.ox.ac.uk%2Fmiis%2F265%2F&rft.title=Some+studies+on+the+deformation+of+the+membrane+in+an+RF+MEMS+switch&rft.creator=Ambati%2C+Vijaya+Raghav&rft.creator=Asheim%2C+Andreas&rft.creator=van+den+Berg%2C+Jan+Bouwe&rft.creator=van+Gennip%2C+Yves&rft.creator=Gerasimov%2C+Tymofiy&rft.creator=Hlod%2C+Andriy&rft.creator=Planque%2C+Bob&rft.creator=van+der+Schans%2C+Martin&rft.creator=van+der+Stelt%2C+Sjors&rft.creator=Rivera%2C+Michelangelo+Vargas&rft.subject=Materials&rft.subject=None%2FOther&rft.description=Radio+Frequency+(RF)+switches+of+Micro+Electro+Mechanical+Systems+(MEMS)+are+appealing+to+the+mobile+industry+because+of+their+energy+efficiency+and+ability+to+accommodate+more+frequency+bands.+However%2C+the+electromechanical+coupling+of+the+electrical+circuit+to+the+mechanical+components+in+RF+MEMS+switches+is+not+fully+understood.%0D%0A%0D%0AIn+this+paper%2C+we+consider+the+problem+of+mechanical+deformation+of+electrodes+in+RF+MEMS+switch+due+to+the+electrostatic+forces+caused+by+the+difference+in+voltage+between+the+electrodes.+It+is+known+from+previous+studies+of+this+problem%2C+that+the+solution+exhibits+multiple+deformation+states+for+a+given+electrostatic+force.+Subsequently%2C+the+capacity+of+the+switch+that+depends+on+the+deformation+of+electrodes+displays+a+hysteresis+behaviour+against+the+voltage+in+the+switch.%0D%0A%0D%0AWe+investigate+the+present+problem+along+two+lines+of+attack.%0D%0AFirst%2C+we+solve+for+the+deformation+states+of+electrodes+using+numerical+methods+such+as+finite+difference+and+shooting+methods.+Subsequently%2C+a+relationship+between+capacity+and+voltage+of+the+RF+MEMS+switch+is+constructed.+The+solutions+obtained+are+exemplified+using+the+continuation+and+bifurcation+package+AUTO.%0D%0ASecond%2C+we+focus+on+the+analytical+methods+for+a+simplified+version+of+the+problem+and+on+the+stability+analysis+for+the+solutions+of+deformation+states.+The+stability+analysis+shows+that+there+exists+a+continuous+path+of+equilibrium+deformation+states+between+the+open+and+closed+state.&rft.date=2008&rft.type=Study+Group+Report&rft.type=NonPeerReviewed&rft.format=application%2Fpdf&rft.language=en&rft.identifier=http%3A%2F%2Fmiis.maths.ox.ac.uk%2Fmiis%2F265%2F1%2Fnxp.pdf&rft.format=application%2Fpdf&rft.language=en&rft.identifier=http%3A%2F%2Fmiis.maths.ox.ac.uk%2Fmiis%2F265%2F2%2Fnxp-report.pdf&rft.identifier=++Ambati%2C+Vijaya+Raghav+and+Asheim%2C+Andreas+and+van+den+Berg%2C+Jan+Bouwe+and+van+Gennip%2C+Yves+and+Gerasimov%2C+Tymofiy+and+Hlod%2C+Andriy+and+Planque%2C+Bob+and+van+der+Schans%2C+Martin+and+van+der+Stelt%2C+Sjors+and+Rivera%2C+Michelangelo+Vargas++(2008)+Some+studies+on+the+deformation+of+the+membrane+in+an+RF+MEMS+switch.++%5BStudy+Group+Report%5D+++++