Laboratory calibration of a MEMS accelerometer sensor

Abstract

In the present work we address MEMS accelerometers. There are many sources of error that affect their behaviour. In this report, we present two mathematical models and associated algorithms for calibrating the device, i.e. compensating for the constant bias error (the offset of its output signal, when the device does not undergo any acceleration), scaling errors (the deviation of the accelerometer’s scale from the unit we want to use, like m/s2 ) and nonorthogonality of the axis.