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Study Group Report

Bhattacharya, A. and Breward, C.J.W. and Gratton, M. and Evans, J. and Nicholas, M. and Please, C. and Schwendeman, D. and Surles, M. and Witelski, T. (2005) Lubrication Layer Perturbations in Chemical-Mechanical Polishing. [Study Group Report]

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